A Scanning Method of Sensor Array for High-Speed Position Measurement
نویسندگان
چکیده
منابع مشابه
Scanning Probe Position Encoder (SPPE)–a new approach for a high precision and high speed position measurement system
and is made available as an electronic reprint (preprint) with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in the paper for a fee or commercial purposes, or modification are prohibited. ABSTRACT The NanoWave Scanning Probe Pos...
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ژورنال
عنوان ژورنال: Transactions of the Society of Instrument and Control Engineers
سال: 1997
ISSN: 0453-4654
DOI: 10.9746/sicetr1965.33.588